Nyob rau hauv lub tshav pob ntawm infrared detectors, lub micro-nano qauv yog siv los txhim kho lub coupling efficiency thiab nqus npaum li cas ntawm photons, thiab thaum tuav lub optical teb ntawm lub ntaus ntawv, lub thickness thiab ntim ntawm lub nqus txheej ntawm cov cuab yeej raug txo, yog li ntawd. txo qhov tsaus nti tam sim no ntawm lub cuab yeej thiab txhim kho tus nqi nrhiav pom ntawm lub cuab yeej. Tam sim no, cov qauv micro-nano siv nyob rau hauv kev tshawb fawb ntawm infrared detectors feem ntau suav nrog: nruab nrab-hom micro-nano qauv, nto hlau-hom micro-nano qauv, thiab peb-dimensional plasmonic kab noj hniav-hom micro-nano qauv. Qhov no yog kev txhim kho ntawm kev ua tau zoo ntawm infrared detectors los ntawm microstructure, uas yog thawj zaug tshwm sim nyob rau hauv cov nyhuv antireflection ntawm ib qho teeb meem spectrum los yog ib tug dav spectrum band. Kev nce ntau ntawm lub teeb pom kev zoo ntawm lub ntsuas ntsuas txhais tau hais tias cov ntaub ntawv nqus cov txheej txheem nyias tuaj yeem siv tau, thiab cov qauv micro-nano nws tus kheej tuaj yeem txo qhov ntim ntawm cov khoom siv photosensitive, uas ua rau lub hauv paus tsaus nti tam sim no ntawm lub cuab yeej. ntsig txog cov khoom ntim tau txo qis. , yog li txhawm rau txhim kho qhov kev kuaj pom tus nqi thiab kev ua tau zoo ntawm infrared detectors.
Kev siv cov txheej txheem micro-nano kom ua tiav ntau qhov kev tswj hwm ntawm cov khoom siv hluav taws xob ntawm cov khoom siv hluav taws xob infrared thiab nws cov kev tshawb fawb txog kev tshawb fawb yog qhov tseem ceeb ntawm kev tshawb fawb infrared tam sim no, thiab nws tseem yog ib qho tseem ceeb rau kev txhim kho cov tiam tshiab ntawm infrared detectors. yav tom ntej. Micro-nano qauv infrared kuaj xyuas cov cuab yeej tseem ntsib teeb meem thiab cov teeb meem xws li kev sib raug zoo, kev ua haujlwm tsis zoo, thiab kev hloov kho tus kheej muaj peev xwm los txhim kho. Micro-nano qauv-txhim kho infrared kuaj cov cuab yeej yuav tsum tau tsom rau cov kev tshawb fawb hauv qab no hauv kev txhim kho yav tom ntej: (1) CMOS-tshaj microstructure detection ntaus qauv qauv tsim qauv thiab kev siv tshuab; (2) Tib lub sijhawm, nws muaj broadband, siab rhiab heev, thiab suab nrov tsawg. Micro-nano qauv infrared nrhiav tshuab nrog cov khoom zoo xws li cov lus teb ceev thiab cov lus teb ceev; (3) Cov cuab yeej hloov kho nrog lub peev xwm tswj tau zoo xws li cov lus teb spectrum. Nrog rau kev kawm tob ntawm cov ntaub ntawv tshiab, cov qauv tshiab, thiab cov txheej txheem tshiab ntawm cov cuab yeej kuaj pom yav tom ntej thiab kev nce qib ntawm kev sib koom ua ke thev naus laus zis, micro-nano qauv-txhim kho infrared detectors yuav qhia tau zoo heev rau daim ntawv thov, muab kev koom ua ke siab, kev ua haujlwm siab thiab tus nqi qis infrared kuaj pom muaj cov kev daws teeb meem tshiab.
Thawj tus sau ntawm tsab xov xwm no yog Zhu Peng, tus pab tshawb fawb ntawm Center for Micro-Nano Manufacturing thiab System Integration, Chongqing Institute of Green thiab Intelligent Technology, Suav Academy of Sciences. Nws yog feem ntau koom nrog hauv kev tshawb fawb ntawm micro-nano kho qhov muag cov cuab yeej, kev npaj cov khoom siv ob sab, thiab kev txhim kho cov cuab yeej tshiab infrared nrhiav kom pom. .
